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Journal: Micromachines, 2025
Volume: 16
Number: 930
930
Article: Integrated LCOS-SLM-Based Laser Slicing System for Aberration Correction in Silicon Carbide Substrate Manufacturing
Authors: by Heng Wang, Qiang Cao, Yuting Hou, Lulu Yu, Tianhao Wu, Zhenzhong Wang and Du Wang
Link: https://www.mdpi.com/2072-666X/16/8/930

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