Zhu, X.; Li, Z.; Liu, Z.; Long, T.; Zhao, J.; Li, X.; Liu, M.; Wang, M.
A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations. Micromachines 2025, 16, 912.
https://doi.org/10.3390/mi16080912
AMA Style
Zhu X, Li Z, Liu Z, Long T, Zhao J, Li X, Liu M, Wang M.
A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations. Micromachines. 2025; 16(8):912.
https://doi.org/10.3390/mi16080912
Chicago/Turabian Style
Zhu, Xuran, Zheng Li, Zhiyu Liu, Tao Long, Jun Zhao, Xinqing Li, Manwen Liu, and Meishan Wang.
2025. "A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations" Micromachines 16, no. 8: 912.
https://doi.org/10.3390/mi16080912
APA Style
Zhu, X., Li, Z., Liu, Z., Long, T., Zhao, J., Li, X., Liu, M., & Wang, M.
(2025). A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations. Micromachines, 16(8), 912.
https://doi.org/10.3390/mi16080912