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Journal: Micromachines, 2025
Volume: 16
Number: 885
Article:
Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating
Authors:
by
Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami, Liguan Li and Jing Wang
Link:
https://www.mdpi.com/2072-666X/16/8/885
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