Zaman, A.; Guneroglu, U.; Alsolami, A.; Li, L.; Wang, J.
Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating. Micromachines 2025, 16, 885.
https://doi.org/10.3390/mi16080885
AMA Style
Zaman A, Guneroglu U, Alsolami A, Li L, Wang J.
Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating. Micromachines. 2025; 16(8):885.
https://doi.org/10.3390/mi16080885
Chicago/Turabian Style
Zaman, Adnan, Ugur Guneroglu, Abdulrahman Alsolami, Liguan Li, and Jing Wang.
2025. "Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating" Micromachines 16, no. 8: 885.
https://doi.org/10.3390/mi16080885
APA Style
Zaman, A., Guneroglu, U., Alsolami, A., Li, L., & Wang, J.
(2025). Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating. Micromachines, 16(8), 885.
https://doi.org/10.3390/mi16080885