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Journal: Micromachines, 2025
Volume: 16
Number: 723
Article:
Influence of Nonlinear Effects Induced by Mode Coupling on Vibration Trajectories of MEMS Micromirrors
Authors:
by
Zhen Chen, Dayong Qiao and Anjie Peng
Link:
https://www.mdpi.com/2072-666X/16/6/723
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