Liu, W.; Cao, A.; Liu, J.; Pang, H.; Deng, Q.; Wang, J.; Hu, S.
Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping. Micromachines 2025, 16, 601.
https://doi.org/10.3390/mi16050601
AMA Style
Liu W, Cao A, Liu J, Pang H, Deng Q, Wang J, Hu S.
Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping. Micromachines. 2025; 16(5):601.
https://doi.org/10.3390/mi16050601
Chicago/Turabian Style
Liu, Wenjing, Axiu Cao, Junbo Liu, Hui Pang, Qiling Deng, Jian Wang, and Song Hu.
2025. "Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping" Micromachines 16, no. 5: 601.
https://doi.org/10.3390/mi16050601
APA Style
Liu, W., Cao, A., Liu, J., Pang, H., Deng, Q., Wang, J., & Hu, S.
(2025). Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping. Micromachines, 16(5), 601.
https://doi.org/10.3390/mi16050601