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Journal: Micromachines, 2025
Volume: 16
Number: 296

Article: A MEMS Pirani Vacuum Gauge Based on Porous Silicon
Authors: by Yuzhe Lin, Zichao Zhang, Jifang Tao and Lianggong Wen
Link: https://www.mdpi.com/2072-666X/16/3/296

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