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Journal: Micromachines, 2025
Volume: 16
Number: 296
Article:
A MEMS Pirani Vacuum Gauge Based on Porous Silicon
Authors:
by
Yuzhe Lin, Zichao Zhang, Jifang Tao and Lianggong Wen
Link:
https://www.mdpi.com/2072-666X/16/3/296
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