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Journal: Micromachines, 2025
Volume: 16
Number: 276
Article:
Progress in Polycrystalline SiC Growth by Low Pressure Chemical Vapor Deposition and Material Characterization
Authors:
by
Michail Gavalas, Yann Gallou, Didier Chaussende, Elisabeth Blanquet, Frédéric Mercier and Konstantinos Zekentes
Link:
https://www.mdpi.com/2072-666X/16/3/276
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