Article Versions Notes

Chen J, Yang X, Iskhandar MSQ, Hasan MK, Baby S, Qasim MH, Löber D, Liu S, Donatiello R, Liebermann S, et al. Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays. Micromachines. 2025; 16(2):157. https://doi.org/10.3390/mi16020157

Chen, Jiahao, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann, and et al. 2025. "Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays" Micromachines 16, no. 2: 157. https://doi.org/10.3390/mi16020157

Chen, J., Yang, X., Iskhandar, M. S. Q., Hasan, M. K., Baby, S., Qasim, M. H., Löber, D., Liu, S., Donatiello, R., Liebermann, S., Xu, G., & Hillmer, H. (2025). Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays. Micromachines, 16(2), 157. https://doi.org/10.3390/mi16020157