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Journal: Micromachines, 2025
Volume: 16
Number: 148
Article:
Model of Quality Factor for (111) 3C-SiC Double-Clamped Beams
Authors:
by
Angela Garofalo, Annamaria Muoio, Sergio Sapienza, Matteo Ferri, Luca Belsito, Alberto Roncaglia and Francesco La Via
Link:
https://www.mdpi.com/2072-666X/16/2/148
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