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Journal: Micromachines, 2025
Volume: 16
Number: 1356

Article: The Principle and Development of Optical Maskless Lithography Based Digital Micromirror Device (DMD)
Authors: by Xianjie Li, Guodong Cui and Guili Xu
Link: https://www.mdpi.com/2072-666X/16/12/1356

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