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Journal: Micromachines, 2025
Volume: 16
Number: 1217
1217
Article: Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride Protection
Authors: by Chengwei Xian, Pengju Kuang, Ning Fu, Zhe Li, Changsong Wang, Yi Zhang, Rudi Zhou, Guangjun Wen, Boyu Fan and Yongjun Huang
Link: https://www.mdpi.com/2072-666X/16/11/1217

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