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Journal: Micromachines, 2024
Volume: 15
Number: 1094
Article:
Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching
Authors:
by
Zhongzhe Zhou, Kun Lu, Yan Shi, Xiang Xi, Jiangkun Sun, Dingbang Xiao and Xuezhong Wu
Link:
https://www.mdpi.com/2072-666X/15/9/1094
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