Zhou, Z.; Lu, K.; Shi, Y.; Xi, X.; Sun, J.; Xiao, D.; Wu, X.
Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching. Micromachines 2024, 15, 1094.
https://doi.org/10.3390/mi15091094
AMA Style
Zhou Z, Lu K, Shi Y, Xi X, Sun J, Xiao D, Wu X.
Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching. Micromachines. 2024; 15(9):1094.
https://doi.org/10.3390/mi15091094
Chicago/Turabian Style
Zhou, Zhongzhe, Kun Lu, Yan Shi, Xiang Xi, Jiangkun Sun, Dingbang Xiao, and Xuezhong Wu.
2024. "Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching" Micromachines 15, no. 9: 1094.
https://doi.org/10.3390/mi15091094
APA Style
Zhou, Z., Lu, K., Shi, Y., Xi, X., Sun, J., Xiao, D., & Wu, X.
(2024). Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching. Micromachines, 15(9), 1094.
https://doi.org/10.3390/mi15091094