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Journal: Micromachines, 2024
Volume: 15
Number: 1001

Article: Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films
Authors: by Le Zhang, Kunxian Yan, Lei Ye, Xiangyu Luo, Jian He and Xiujian Chou
Link: https://www.mdpi.com/2072-666X/15/8/1001

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