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Journal: Micromachines, 2024
Volume: 15
Number: 866

Article: Optimization of Grayscale Lithography for the Fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
Authors: by Angelos Bouchouri, Muhammad Nadeem Akram, Per Alfred Øhlckers and Xuyuan Chen
Link: https://www.mdpi.com/2072-666X/15/7/866

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