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Journal: Micromachines, 2024
Volume: 15
Number: 784

Article: Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures
Authors: by Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang and Litao Sun
Link: https://www.mdpi.com/2072-666X/15/6/784

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