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Journal: Micromachines, 2024
Volume: 15
Number: 688
688
Article: Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance
Authors: by Haolin Li, Qingrui Yang, Yi Yuan, Shuai Shi, Pengfei Niu, Quanning Li, Xuejiao Chen, Menglun Zhang and Wei Pang
Link: https://www.mdpi.com/2072-666X/15/6/688

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