Li, H.; Yang, Q.; Yuan, Y.; Shi, S.; Niu, P.; Li, Q.; Chen, X.; Zhang, M.; Pang, W.
Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance. Micromachines 2024, 15, 688.
https://doi.org/10.3390/mi15060688
AMA Style
Li H, Yang Q, Yuan Y, Shi S, Niu P, Li Q, Chen X, Zhang M, Pang W.
Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance. Micromachines. 2024; 15(6):688.
https://doi.org/10.3390/mi15060688
Chicago/Turabian Style
Li, Haolin, Qingrui Yang, Yi Yuan, Shuai Shi, Pengfei Niu, Quanning Li, Xuejiao Chen, Menglun Zhang, and Wei Pang.
2024. "Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance" Micromachines 15, no. 6: 688.
https://doi.org/10.3390/mi15060688
APA Style
Li, H., Yang, Q., Yuan, Y., Shi, S., Niu, P., Li, Q., Chen, X., Zhang, M., & Pang, W.
(2024). Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance. Micromachines, 15(6), 688.
https://doi.org/10.3390/mi15060688