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Journal: Micromachines, 2024
Volume: 15
Number: 460
460
Article: Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching
Authors: by Yu Wu, Xianshan Dong, Xuefang Wang, Junfeng Xiao, Quanquan Sun, Lifeng Shen, Jie Lan, Zhenfeng Shen, Jianfeng Xu and Yuqingyun Du
Link: https://www.mdpi.com/2072-666X/15/4/460

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