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Journal: Micromachines, 2024
Volume: 15
Number: 412

Article: Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors
Authors: by Ying Wang, Yu Xiao, Xiaofeng Zhao and Dianzhong Wen
Link: https://www.mdpi.com/2072-666X/15/3/412

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