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Journal: Micromachines, 2024
Volume: 15
Number: 412
Article:
Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors
Authors:
by
Ying Wang, Yu Xiao, Xiaofeng Zhao and Dianzhong Wen
Link:
https://www.mdpi.com/2072-666X/15/3/412
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