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Journal: Micromachines, 2024
Volume: 15
Number: 397
Article:
Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications
Authors:
by
Irma Rocio Vazquez, Zeynel Guler and Nathan Jackson
Link:
https://www.mdpi.com/2072-666X/15/3/397
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