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Micromachines
Volume 15
Issue 2
10.3390/mi15020174
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Article

A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

by
Bowen Duan
1,†,
Zhenyin Hai
1,*,†,
Maocheng Guo
1,
Yongqiu Zheng
2,
Jiamin Chen
2,
Jiandong Bai
2,
Zhixuan Su
1,
Rui Liang
2,
Hongtian Zhu
1,
Qi Zhang
1 and
Chenyang Xue
1,2,*
1
School of Aerospace Engineering, Xiamen University, Xiamen 361102, China
2
Stale Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Micromachines 2024, 15(2), 174; https://doi.org/10.3390/mi15020174
Submission received: 27 December 2023 / Revised: 18 January 2024 / Accepted: 22 January 2024 / Published: 24 January 2024
(This article belongs to the Section E: Engineering and Technology)
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Abstract

In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry–Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry–Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor’s Fabry–Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0–10 MPa in the temperature range of 20–370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.
Keywords: fiber-optic sensors; high-temperature pressure measurement; Fabry–Perot cavity; high sensitivity; wide pressure range fiber-optic sensors; high-temperature pressure measurement; Fabry–Perot cavity; high sensitivity; wide pressure range

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MDPI and ACS Style

Duan, B.; Hai, Z.; Guo, M.; Zheng, Y.; Chen, J.; Bai, J.; Su, Z.; Liang, R.; Zhu, H.; Zhang, Q.; et al. A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure. Micromachines 2024, 15, 174. https://doi.org/10.3390/mi15020174

AMA Style

Duan B, Hai Z, Guo M, Zheng Y, Chen J, Bai J, Su Z, Liang R, Zhu H, Zhang Q, et al. A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure. Micromachines. 2024; 15(2):174. https://doi.org/10.3390/mi15020174

Chicago/Turabian Style

Duan, Bowen, Zhenyin Hai, Maocheng Guo, Yongqiu Zheng, Jiamin Chen, Jiandong Bai, Zhixuan Su, Rui Liang, Hongtian Zhu, Qi Zhang, and et al. 2024. "A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure" Micromachines 15, no. 2: 174. https://doi.org/10.3390/mi15020174

APA Style

Duan, B., Hai, Z., Guo, M., Zheng, Y., Chen, J., Bai, J., Su, Z., Liang, R., Zhu, H., Zhang, Q., & Xue, C. (2024). A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure. Micromachines, 15(2), 174. https://doi.org/10.3390/mi15020174

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