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Journal: Micromachines, 2024
Volume: 15
Number: 65
65
Article: Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers
Authors: by Shaolin Zhang, Zhi Li, Qiu Wang, Yuanxia Yang, Yongzhen Wang, Wen He, Jinquan Liu, Liangcheng Tu and Huafeng Liu
Link: https://www.mdpi.com/2072-666X/15/1/65

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