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Journal: MicromachinesVolume: 15Number: 65
Article: Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers
  • Authors:
  • Shaolin Zhang1,
  • Zhi Li1 and
  • Qiu Wang1
  • et al.
Link: https://www.mdpi.com/2072-666X/15/1/65

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