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Journal: Micromachines, 2024
Volume: 15
Number: 41

Article: Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors
Authors: by Zhuofan Wang, Hongliang Lu, Yuming Zhang, Chen Liu, Haonan Zhang and Yanhao Yu
Link: https://www.mdpi.com/2072-666X/15/1/41

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