Wang, Z.; Lu, H.; Zhang, Y.; Liu, C.; Zhang, H.; Yu, Y.
Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors. Micromachines 2024, 15, 41.
https://doi.org/10.3390/mi15010041
AMA Style
Wang Z, Lu H, Zhang Y, Liu C, Zhang H, Yu Y.
Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors. Micromachines. 2024; 15(1):41.
https://doi.org/10.3390/mi15010041
Chicago/Turabian Style
Wang, Zhuofan, Hongliang Lu, Yuming Zhang, Chen Liu, Haonan Zhang, and Yanhao Yu.
2024. "Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors" Micromachines 15, no. 1: 41.
https://doi.org/10.3390/mi15010041
APA Style
Wang, Z., Lu, H., Zhang, Y., Liu, C., Zhang, H., & Yu, Y.
(2024). Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors. Micromachines, 15(1), 41.
https://doi.org/10.3390/mi15010041