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Journal: Micromachines, 2023
Volume: 14
Number: 1394

Article: Argon and Oxygen Gas Flow Rate Dependency of Sputtering-Based Indium-Gallium-Zinc Oxide Thin-Film Transistors
Authors: by Youngmin Han, Dong Hyun Lee, Eou-Sik Cho, Sang Jik Kwon and Hocheon Yoo
Link: https://www.mdpi.com/2072-666X/14/7/1394

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