Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN
Abstract
1. Introduction
2. Experimental
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Out-of-Plane Relationship | In-Plane Relationship |
---|---|
AlN (0001)//Mo (111)//Sapphire (0001) | |
AlN (0001)//Mo (110)//Sapphire (0001) | |
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Kim, J.; Kim, Y.; Hong, S.-M. Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN. Micromachines 2023, 14, 966. https://doi.org/10.3390/mi14050966
Kim J, Kim Y, Hong S-M. Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN. Micromachines. 2023; 14(5):966. https://doi.org/10.3390/mi14050966
Chicago/Turabian StyleKim, Jihong, Youngil Kim, and Sung-Min Hong. 2023. "Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN" Micromachines 14, no. 5: 966. https://doi.org/10.3390/mi14050966
APA StyleKim, J., Kim, Y., & Hong, S.-M. (2023). Structural Analysis of Mo Thin Films on Sapphire Substrates for Epitaxial Growth of AlN. Micromachines, 14(5), 966. https://doi.org/10.3390/mi14050966