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Journal: Micromachines, 2023
Volume: 14
Number: 846
846
Article: Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes
Authors: by Yuyu Zhang, Yu Wu, Quanquan Sun, Lifeng Shen, Jie Lan, Lingxi Guo, Zhenfeng Shen, Xuefang Wang, Junfeng Xiao and Jianfeng Xu
Link: https://www.mdpi.com/2072-666X/14/4/846

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