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Journal: Micromachines, 2023
Volume: 14
Number: 753
Article:
Effective Chemical Lift-Off for Air-Tunnel GaN on a Trapezoid-Patterned Sapphire Substrate
Authors:
by
Min-joo Ahn, Kyu-yeon Shim, Woo-seop Jeong, Seongho Kang, Hwayoung Kim, Seunghee Cho and Dongjin Byun
Link:
https://www.mdpi.com/2072-666X/14/4/753
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