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Journal: Micromachines, 2023
Volume: 14
Number: 700

Article: Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
Authors: by Almur A. S. Rabih, Mohammad Kazemi, Michaël Ménard and Frederic Nabki
Link: https://www.mdpi.com/2072-666X/14/3/700

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