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Journal: MicromachinesVolume: 14Number: 2198
Article: High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers
  • Authors:
  • Xiaoyu Ren2,
  • Selina X. Yao3 and
  • Jiacheng Zhu4
  • et al.
Link: https://www.mdpi.com/2072-666X/14/12/2198

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