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Journal: Micromachines, 2023
Volume: 14
Number: 2198
2198
Article: High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers
Authors: by Xiaoyu Ren, Selina X. Yao, Jiacheng Zhu, Zejun Deng, Yijia Wang, Baoshun Zhang, Zhongming Zeng and Hao Zhai
Link: https://www.mdpi.com/2072-666X/14/12/2198

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