Pleshakov, G.A.; Kalinin, I.A.; Ivanov, A.V.; Roslyakov, I.V.; Yaminsky, I.V.; Napolskii, K.S.
Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films. Micromachines 2023, 14, 2003.
https://doi.org/10.3390/mi14112003
AMA Style
Pleshakov GA, Kalinin IA, Ivanov AV, Roslyakov IV, Yaminsky IV, Napolskii KS.
Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films. Micromachines. 2023; 14(11):2003.
https://doi.org/10.3390/mi14112003
Chicago/Turabian Style
Pleshakov, Georgii A., Ivan A. Kalinin, Alexey V. Ivanov, Ilya V. Roslyakov, Igor V. Yaminsky, and Kirill S. Napolskii.
2023. "Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films" Micromachines 14, no. 11: 2003.
https://doi.org/10.3390/mi14112003
APA Style
Pleshakov, G. A., Kalinin, I. A., Ivanov, A. V., Roslyakov, I. V., Yaminsky, I. V., & Napolskii, K. S.
(2023). Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films. Micromachines, 14(11), 2003.
https://doi.org/10.3390/mi14112003
