Liu, W.; Zhao, T.; He, Z.; Ye, J.; Gong, S.; Wang, X.; Yang, Y.
The High-Efficiency Design Method for Capacitive MEMS Accelerometer. Micromachines 2023, 14, 1891.
https://doi.org/10.3390/mi14101891
AMA Style
Liu W, Zhao T, He Z, Ye J, Gong S, Wang X, Yang Y.
The High-Efficiency Design Method for Capacitive MEMS Accelerometer. Micromachines. 2023; 14(10):1891.
https://doi.org/10.3390/mi14101891
Chicago/Turabian Style
Liu, Wen, Tianlong Zhao, Zhiyuan He, Jingze Ye, Shaotong Gong, Xianglong Wang, and Yintang Yang.
2023. "The High-Efficiency Design Method for Capacitive MEMS Accelerometer" Micromachines 14, no. 10: 1891.
https://doi.org/10.3390/mi14101891
APA Style
Liu, W., Zhao, T., He, Z., Ye, J., Gong, S., Wang, X., & Yang, Y.
(2023). The High-Efficiency Design Method for Capacitive MEMS Accelerometer. Micromachines, 14(10), 1891.
https://doi.org/10.3390/mi14101891