Effects of Oxygen Pressure on the Microstructures and Nanomechanical Properties of Samarium-Doped BiFeO3 Thin Films
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
Ds (nm) | DWH (nm) | ε (%) | H (GPa) | Ef (GPa) | (GPa) | |
---|---|---|---|---|---|---|
BFO thin films [41] | 24.5–51.2 | ― | ― | 6.8–10.6 | 131.4–170.8 | ― |
BFO thin films [42] | 5.6–10.1 | ― | ― | 7.5–7.9 | 111.1–118.3 | ― |
La-doped BFO ceramics [43] | ― | ― | ― | 2.5 ± 0.2 | 80 ± 10 | ― |
SmBFO_10mTorr [#] | 20 | 33 | 0.22 | 8.2 ± 0.3 | 114.3 ± 1.2 | 0.0422 |
(oxygen partial pressure) | ||||||
SmBFO_30mTorr [#] | 22 | 41 | 0.24 | 7.1 ± 0.1 | 97.2 ± 2.6 | 0.0378 |
(oxygen partial pressure) | ||||||
SmBFO_50mTorr [#] | 25 | 52 | 0.25 | 6.5 ± 0.2 | 85.6 ± 4.3 | 0.0374 |
(oxygen partial pressure) |
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Gao, C.-S.; Jian, S.-R.; Le, P.H.; Chou, W.-C.; Juang, J.-Y.; Chang, H.-W.; Lin, C.-M. Effects of Oxygen Pressure on the Microstructures and Nanomechanical Properties of Samarium-Doped BiFeO3 Thin Films. Micromachines 2023, 14, 1879. https://doi.org/10.3390/mi14101879
Gao C-S, Jian S-R, Le PH, Chou W-C, Juang J-Y, Chang H-W, Lin C-M. Effects of Oxygen Pressure on the Microstructures and Nanomechanical Properties of Samarium-Doped BiFeO3 Thin Films. Micromachines. 2023; 14(10):1879. https://doi.org/10.3390/mi14101879
Chicago/Turabian StyleGao, Chih-Sheng, Sheng-Rui Jian, Phuoc Huu Le, Wu-Ching Chou, Jenh-Yih Juang, Huang-Wei Chang, and Chih-Ming Lin. 2023. "Effects of Oxygen Pressure on the Microstructures and Nanomechanical Properties of Samarium-Doped BiFeO3 Thin Films" Micromachines 14, no. 10: 1879. https://doi.org/10.3390/mi14101879