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Journal: Micromachines, 2023
Volume: 14
Number: 205
Article:
Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method
Authors:
by
Ping Luo, Yali Zou, Xinyu Yang, Juntao Li, Xuan Huang, Jian Zhou, Xing Han, Yushuai Liu, Yuhao Liu and Tao Wu
Link:
https://www.mdpi.com/2072-666X/14/1/205
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