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Journal: Micromachines, 2023
Volume: 14
Number: 190
Article:
Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers
Authors:
by
Xinlong Huang, Xianshan Dong, Guizhen Du and Youwang Hu
Link:
https://www.mdpi.com/2072-666X/14/1/190
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