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Journal: Micromachines, 2023
Volume: 14
Number: 190

Article: Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers
Authors: by Xinlong Huang, Xianshan Dong, Guizhen Du and Youwang Hu
Link: https://www.mdpi.com/2072-666X/14/1/190

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