Qu, Y.; Luo, T.; Wen, Z.; Wei, M.; Gu, X.; Chen, X.; Zou, Y.; Cai, Y.; Liu, Y.; Sun, C.
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator. Micromachines 2023, 14, 157.
https://doi.org/10.3390/mi14010157
AMA Style
Qu Y, Luo T, Wen Z, Wei M, Gu X, Chen X, Zou Y, Cai Y, Liu Y, Sun C.
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator. Micromachines. 2023; 14(1):157.
https://doi.org/10.3390/mi14010157
Chicago/Turabian Style
Qu, Yuanhang, Tiancheng Luo, Zhiwei Wen, Min Wei, Xiyu Gu, Xiang Chen, Yang Zou, Yao Cai, Yan Liu, and Chengliang Sun.
2023. "Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator" Micromachines 14, no. 1: 157.
https://doi.org/10.3390/mi14010157
APA Style
Qu, Y., Luo, T., Wen, Z., Wei, M., Gu, X., Chen, X., Zou, Y., Cai, Y., Liu, Y., & Sun, C.
(2023). Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator. Micromachines, 14(1), 157.
https://doi.org/10.3390/mi14010157