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Journal: Micromachines, 2022
Volume: 13
Number: 1454
Article:
A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching
Authors:
by
Chenying Wang, Lei Li, Weixuan Jing, Yaxin Zhang, Song Wang, Qijing Lin, Dan Xian, Qi Mao, Yijun Zhang, Duanzhi Duan, Ming Liu and Zhuangde Jiang
Link:
https://www.mdpi.com/2072-666X/13/9/1454
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