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Journal: Micromachines, 2022
Volume: 13
Number: 1282
Article:
Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
Authors:
by
Niklas Wolff, Md Redwanul Islam, Lutz Kirste, Simon Fichtner, Fabian Lofink, Agnė Žukauskaitė and Lorenz Kienle
Link:
https://www.mdpi.com/2072-666X/13/8/1282
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