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Journal: Micromachines, 2022
Volume: 13
Number: 1071
1071
Article: A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost
Authors: by Yingchun Fu, Guowei Han, Jiebin Gu, Yongmei Zhao, Jin Ning, Zhenyu Wei, Fuhua Yang and Chaowei Si
Link: https://www.mdpi.com/2072-666X/13/7/1071

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