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Article
Peer-Review Record

Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering

Micromachines 2022, 13(6), 966; https://doi.org/10.3390/mi13060966
by Xianyue Deng *, Chin-I Tang, Chuan Luo and Yuzuru Takashima *
Reviewer 1:
Reviewer 2: Anonymous
Micromachines 2022, 13(6), 966; https://doi.org/10.3390/mi13060966
Submission received: 14 May 2022 / Revised: 9 June 2022 / Accepted: 14 June 2022 / Published: 18 June 2022
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)

Round 1

Reviewer 1 Report


Comments for author File: Comments.docx

Author Response

Thank you very much for your review! Please see the attachment.

Author Response File: Author Response.docx

Reviewer 2 Report

The paper "Diffraction efficiency of MEMS phase light modulator, TI-PLM for quasi continuous and multi-point beam steering" present 3 aspects for diffraction efficiency for available phases from a commercially available PLM. 

The three sections are relevant and bring new knowledge to the field, by doing a systematic analysis on nonlinearities, proposing an algorithm to overcome the nonlinearities identified on the first aspect and by analyzing the effect of the algorithm. 

There are some typos, as line 52, and redundancies as in line 24, but otherwise a good written and well-structured article. 

More references to support the motivation would help to strengthen the impact. 

A conclusion section with the interconnection between the three investigated aspects instead of the summary section will also be beneficial. 

Author Response

Thank you very much for your review! Please see the attachment.

Author Response File: Author Response.docx

Round 2

Reviewer 1 Report

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