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Effect of Substrate-RF on Sub-200 nm Al0.7Sc0.3N Thin Films
 
 

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Journal: Micromachines, 2022
Volume: 13
Number: 887

Article: High-Temperature Ferroelectric Behavior of Al0.7Sc0.3N
Authors: by Daniel Drury, Keisuke Yazawa, Andriy Zakutayev, Brendan Hanrahan and Geoff Brennecka
Link: https://www.mdpi.com/2072-666X/13/6/887

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