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Journal: Micromachines, 2022
Volume: 13
Number: 318

Article: Application of Flow Field Analysis in Ion Beam Figuring for Ultra-Smooth Machining of Monocrystalline Silicon Mirror
Authors: by Zhe Wang, Lingqi Wu, Yuanyuan Fang, Aihuan Dun, Jiaoling Zhao, Xueke Xu and Xiaolei Zhu
Link: https://www.mdpi.com/2072-666X/13/2/318

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