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Journal: MicromachinesVolume: 13Number: 270
Article: An Experiment-Based Study of Formation Damage Using a Microetching Model Displacement Method
  • Authors:
  • Feng Wu1,*,
  • Jin Dai1 and
  • Lei Shi2
  • et al.
Link: https://www.mdpi.com/2072-666X/13/2/270

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