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Journal: Micromachines, 2022
Volume: 13
Number: 270
270
Article: An Experiment-Based Study of Formation Damage Using a Microetching Model Displacement Method
Authors: by Feng Wu, Jin Dai, Lei Shi, Lin Fan, Yao Guan, Yuhan Li, Qinghui Wang and Chunchao Chen
Link: https://www.mdpi.com/2072-666X/13/2/270

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