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Journal: Micromachines, 2022
Volume: 13
Number: 264
Article:
Investigation of the Contact Characteristics of Silicon–Gold in an Anodic Bonding Structure
Authors:
by
Lin Zhang, Kaicong Cao, Longqi Ran, Huijun Yu and Wu Zhou
Link:
https://www.mdpi.com/2072-666X/13/2/264
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