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Journal: Micromachines, 2022
Volume: 13
Number: 202
Article:
FEM Simulation of a High-Performance 128°Y–X LiNbO3/SiO2/Si Functional Substrate for Surface Acoustic Wave Gyroscopes
Authors:
by
Rui Ma, Weiguo Liu, Xueping Sun, Shun Zhou and Dabin Lin
Link:
https://www.mdpi.com/2072-666X/13/2/202
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