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Journal: Micromachines, 2022
Volume: 13
Number: 2260
Article:
Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections
Authors:
by
Meilin Ji, Haolin Yang, Yongxin Zhou, Xueying Xiu, Haochen Lv and Songsong Zhang
Link:
https://www.mdpi.com/2072-666X/13/12/2260
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