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Journal: Micromachines, 2022
Volume: 13
Number: 1967
Article:
A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope
Authors:
by
Lu Jia, Guowei Han, Zhenyu Wei, Chaowei Si, Jin Ning, Fuhua Yang and Weihua Han
Link:
https://www.mdpi.com/2072-666X/13/11/1967
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