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Journal: Micromachines, 2022
Volume: 13
Number: 1597

Article: PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm
Authors: by Qing Yu, Guoxiang Fan, Wei Ren, Qingqing Fan, Jinming Ti, Junhong Li and Chenghao Wang
Link: https://www.mdpi.com/2072-666X/13/10/1597

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